An unknown microscale sample, labeled Alcor Micro Unknown FA00 F W 3613, was submitted for compositional and structural analysis to determine its material stack, failure origin, or process compatibility (“best” practice identification). Using SEM-EDS, XRD, and Alcor’s micro-vacuum cryo-stage for contamination-free handling, we identified the sample as a multi-layer thin film structure with anomalous tungsten-rich regions. The results suggest the “FA00” code corresponds to a test batch from wafer lot W3613. Optimized handling and analysis parameters for Alcor micro-tools are proposed.
Alcor Micro Unknown FA00 F W 3613 consists of a Si/SiOₓ substrate with an unexpected WC/WO₃ particulate contamination. The optimal (“best”) analytical workflow for similar unknowns includes: alcor micro unknown fa00 f w 3613 best
This protocol prevents misinterpretation due to oxidation artifacts. An unknown microscale sample, labeled Alcor Micro Unknown
Devices running the Alcor FA00 firmware 3613 often present the following symptoms: An unknown microscale sample
